Nanguang vacuum

Vacuum science and technology as independent scientific system or from the beginning 20 century. At this time because of electronic devices, atomic energy, space technology for vacuum environment needs, in urgent, thus greatly promoted the development of this technology. In addition, detection, as for vacuum system and its components and other products to their own development with many scientific innovation means the conditions and the modern science and technology, because the infiltration and cross each other, so it enormously enrich the connotation of the vacuum science and technology. Especially "ultra-high vacuum", "super clean the surface" appear, reveals the nature, many new phenomenon and law, including the development of nanometer technology is a good example. At present "vacuum science and technology" includes many of the subject, branch, table 1-1 gives "international vacuum science technology and application association (IUVSTA), the division of the methods and the content of the branch discipline."

Vacuum science and technology branch discipline

Branch discipline the content of the branch
Classic vacuum technology
Vacuum get, measured, leak detection, vacuum system and components.

Vacuum metallurgy
Vacuum smelting casting, vacuum deairing with casting, vacuum heat-treatment, vacuum, vacuum reduction evaporate leave welding carbonized, single preparation, surface treatment.

Plasma science and technology
Plasma in magnetron sputtering ion plating, such as the application of the equipment. Plasma chemical vapor deposition, high purity single crystal, the plasma membrane preparation display device.

Film science and technology
Vacuum evaporation plating, vacuum, vacuum sputtering ion plating, chemical vapor deposition.

Electronic material and processing technology
Vacuum electronic devices, semiconductor materials, photoelectric material, sensitive materials, film, film materials, electronic material intelligent material, deposition processing technology, epitaxy growth technology, mask and etching, etc.

Surface science
The solid surface electronic structure, the atomic structure, ultra-high vacuum scanning tunneling microscope (STM), the surface performance test.

Applied surface science
Ultraviolet light electronic energy spectrum analysis and spectrum, ion X photoelectron spectroscopy analysis instrument to surface.

Nano science and technology
The preparation of nanometer materials, nano biology, nano machinery and nano dynamics, nano electronics, nano medical treatment.