Nanguang vacuum

Four southern Sichuan light vacuum vacuum technology series - vacuum coating

Vacuum coating technology is a novel synthesis and processing of new technologies is an important part of the surface engineering technology. Vacuum coating technology is the use of physical, chemical means, solid surface coated with a special performance of the film, so that the solid surface with a wear-resistant, high temperature resistance, corrosion resistance, oxidation resistance, radiation, conductive, magnetic, insulating and decorative better than the solid material itself superior performance to achieve to improve product quality, extend product life, energy conservation, and access to significant technical and economic benefits. Vacuum coating technology known as the most promising technologies, and has been the development of high-tech industry to show an attractive market prospects.

vacuum technology

Vacuum: Less than an atmospheric pressure of the gas state.
        In 1643, Italian physicist Torricelli (E.Torricelli,) first famous experiments of atmospheric pressure, to obtain a vacuum.
Natural vacuum: air pressure decreases with an increase with altitude exists in the universe.
Artificial vacuum: vacuum pump removing the gas container.
Vacuum:
1 atm = 760mmHg = 760 (Torr)
1 standard atmosphere = 1.013x105 Pa
1Torr = 133.3Pa
Vacuum region of the divided
There is no unified regulations, generally the most common is divided into:
    Rough vacuum
    Low vacuum
    High vacuum
    Ultrahigh vacuum
    High vacuum
Vacuum to obtain:
• low vacuum (10-1Pa) - mechanical pumps
High vacuum (10-3 ~ 10-4Pa) - diffusion pump
• more Vacuum - turbo molecular pump
Measurement of the degree of vacuum:
Practical vacuum gauges are:
• U-shaped vacuum gauge - 10-5 to 1 Pa
• thermal conductivity vacuum gauge - 100 ~ 10-1 Pa
• High vacuum ionization gauge - 10-1 ~ 10-5 Pa
B-A, ultra-high vacuum ionization meter - 10-1 ~ 10-9 Pa
(Beye was developed and Albert)
• partial pressure vacuum gauge - 10-1 ~ 10-14 Pa
Occupies a key position in the vacuum technology in the modern advanced science and technology, such as surface science, thin film technology, space science, high-energy particle accelerators, microelectronics, materials science, an increasingly wide range of applications in industrial production.
Second, thin films of
The film preparation methods are many, such as liquid preparation methods, electrochemical preparation method, the direct preparation of thin film vapor deposition-based, including:
◆ chemical vapor deposition (CVD)
           With space for gas-phase chemical reaction solid state thin film deposited on the substrate surface.
◆ physical vapor deposition (PVD)
           Physical methods (such as arc, high-frequency or high-temperature heat source) source material transferred to the gas phase, solid-state thin-film deposited on the substrate surface. Including vacuum evaporation, vacuum sputtering.
• vacuum evaporation coating: the production of thin film materials heated in a vacuum evaporation, so that deposition in the appropriate surface. The advantage is that a higher deposition rate, the structure of the evaporation source is simple, easy production, low cost, but not the evaporation of refractory metals and dielectric materials. The biggest drawback is the low material utilization (the specimen in the basket-like evaporation source to the solid angle, solid angle of the evaporation source of the scaphoid is loosed to)
• Vacuum sputtering: When high-energy particles (the electric field to accelerate positive ions) hit a solid surface exchange energy with the surface of atoms, molecules, so that these atoms, molecules splash out on the substrate to form thin films. Sputtering material utilization is much higher than the evaporation coating.
The application of thin-film technology
Thin-film technology has wide application in modern science and technology and industrial production: For example: the optical system used in a variety of reflective film, antireflection coatings, filters, beam splitter, polarizer, etc.; electronic devices using thin film resistors planar transistors and LSI also depends on the manufacture of thin-film technology, in particular; hard protective film allows a variety of often wear the device surface hardening, greatly enhancing the surface of the wear; plastics, ceramics, plaster and glass and other non-metallic materials coated with metal film decorative landscaping, some alloy film also plays the role of the protective layer; magnetic thin film has a memory function in the computer storage recording media plays an important role.